CHY-5SMT 13.56MHz Vacuum Plasma Cleaner with Quartz Chamber

CHY-5SMT is a compact vacuum plasma cleaner with quartz chamber.The chamber size is Φ150×270Lmm with 13.56MHz frequency power.It is equipped with two float flow meter can allows gas insert.Accuracy MFC is availiable.

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Products Description

Model No.	CHY-5SMT
Chamber Material	Quartz Chamber or Stainless Steel
Chamber Size	Φ150×270Lmm

Capacity	5L
Outer Diemsnion	560×540×550mmL×W×H
Working Frequency	13.56MHz（Manually Match）
Power	0-200W（Adjustable);300W for option
Flowmeter	2 way float flow meter;10-160ml/min adjustable
Vacuum Gauge	Pressure gauge (quantified value display)
Control Mode	Fully automatic control and manual (PLC interface)
Cleaning time	0- 99999S Adjustable
Vacuum Degree	1-30pa
Chamber Temper	＜30℃
Power Supply	220V/50Hz
Vacuum Pump	VRD-4