CHY-2SMT 13.56MHz Compact Vacuum Plasma Cleaner with 2L Capacity

CHY-2SMT is a compact vacuum plasma cleaner with quartz chamber.The chamber size is Φ100×270Lmm with 13.56MHz frequency power.It is equipped with two float flow meter can allows gas insert.Accuracy MFC is availiable.00

Inquire Now Next Product

Products Description

Model No.	CHY-2SMT
Chamber Material	Quartz Chamber or Stainless Steel
Chamber Size（Quartz）	Φ100×270Lmm

Capacity	2L
Working Frequency	13.56MHz（Manually Match）
Power	0-200W（Adjustable);
Flowmeter	2 way float flow meter;10-160ml/min adjustable
Vacuum Gauge	Pressure gauge (quantified value display)
Control Mode	Fully automatic control and manual (PLC interface)
Cleaning time	0- 99999S Adjustable
Vacuum Degree	1-30pa
Chamber Temper	＜30℃
Power Supply	220V/50Hz
Vacuum Pump	VRD-4
Dimension	560540550mm