CHY-15ST 13.56MHz 600W Vacuum Plasma Cleaner with 15L Chamber Size

CHY-15ST is a compact vacuum plasma cleaner with stainless steel chamber.The chamber size is 370×320×130mm 13.56MHz frequency power; 260*320*200mm for option.It is equipped with two float flow meter can allows gas insert.Accuracy MFC is availiable.

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Products Description

Model No.	CHY-15ST
Chamber Material	Stainless Steel
Chamber Size	370×320×130mm; 260320200mm for option
Capacity	15L
Working Frequency	13.56MHz（Auto Match）
Power	0-600W（Adjustable);300W/500W for option
Flowmeter	2 way float flow meter;10-160ml/min adjustable; MFC flow controller for option
Vacuum Gauge	Pressure gauge (quantified value display)
Control Mode	Fully automatic control and manual (PLC interface)
Cleaning time	0- 9999S Adjustable
Vacuum Degree	10-100pa
Chamber Temper	＜30℃
Power Supply	220V/50Hz
Vacuum Pump	VRD-8
Dimension	650x600x750mm