CHY-3Z Laboratory 3 Way Gas Mixer with Touch Panel

CHY-3Z gas mixing station is designed for the control of various types of gasses flowing through vacuum-sealed tube furnaces called for CVD system. It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top. The new design adopt 7" touch panel which makes gas flow speed can be settled by programmable.

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Products Description

Model No.	CHY-3Z
Flow Controller	7" touch panel programmable control
Flowmeter Core	304 stainless steel
Measure Accuracy	Accuracy: ±1.5%FS Linearity: ±1%FS Repeatability: ±0.2%FS
Pressure Range	-0.1~0.15MPa
A way gas range	0~50SCCM
B way gas range	0~200SCCM
C way gas range	0~500SCCM, or as customized
Alarm	Flow deviation alarm
Working temperature	5~45 ºC
Power Supply	AC220V 50Hz
Dimension	1060700780mm