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High precision servo motor drive, high precision, high repeatability
PLC control, 7-inch full-color touch screen operation, HDPE inner chamber, solvent resistant PC transparent cover
Can add back cleaning and edge removal glue functions to meet industrial machine applications
Can add splash proof cleaning and development functions to meet customization needs
Processable substrate size range: fragments smaller than 1cm to 8-inch circular substrates
Products Description
| Model No. | AC200-SE |
| Max.Wafer Diameter | 1cm-8” |
| Speed adjustable range | 10000rpm,adjustable |
| Acceleration range | 50000rpm/s |
| Speed resolution | 1rpm |
| Coating uniform | <±3% |
| Max single step time | 3000s |
| Time resolution | 0.1s |
| Programmable control | 100 programmable,100steps |
| Motor | DC servo Motor |
| Vacuum plate | O. D 10mm, 25mm 2",4", 6" for option |
| Working voltage | AC220V, 50Hz |
| Dimension | 345*460*320mm |
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