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CHY-IC8000 Laboratory Programmable Control Heating Spin Coater max 200 degree

CHY-IC8000 Laboratory Programmable Control Heating Spin Coater max 200 degree

The CHY- IC8000 heating spin coater is a programmable control spin coater with heating function, max heating temperature can upto 200 degree. It is stuiable for max 6 inch sample size coating.

Products Description

Model No.CHY-IC8000
Chamber MaterialHDPE chamber with PC cover
Temperature rangeRt~200 ℃
Max Coating sample size6 inch wafer; other size can customized
Coating Speed100~8000rpm
Speed Resolution±1rpm
Spin coating acceleration100-5000rpm/s
Maximum coating time3000s
Temperature uniformity≤±2%
Temperature accuracy<± 0.5℃
Programmable control100 program; each program 100 steps
Power supplyAC220V/50Hz
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