| Model No. | CHY-IC8000 |
| Chamber Material | HDPE chamber with PC cover |
| Temperature range | Rt~200 ℃ |
| Max Coating sample size | 6 inch wafer; other size can customized |
| Coating Speed | 100~8000rpm |
| Speed Resolution | ±1rpm |
| Spin coating acceleration | 100-5000rpm/s |
| Maximum coating time | 3000s |
| Temperature uniformity | ≤±2% |
| Temperature accuracy | <± 0.5℃ |
| Programmable control | 100 program; each program 100 steps |
| Power supply | AC220V/50Hz |
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