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The OT100 Flash Film Formation Apparatus has a compact size and is suitable for laboratory flash evaporation film-forming. This product adopts touch based program control and is easy to operate. Customizable heating function is availiable
Products Description
| Model No. | CHY-OT100 |
| Max processing wafer | 150*150mm |
| Wafer height | 6mm |
| Pump speed | 60m3/h, 10s to 10Pa; 40s to 1Pa |
| Limited pressure | <0.5Pa |
| Control | 7" Touch panel with programmable control |
| Gas flow range | 0.1-1L/min |
| Power supply | AC220V/50Hz |
| Dimension | 295*366*270mm |
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